Инд. авторы:	Bulgakova O.A., Bulgakova N.M., Zhukov V.P.
Заглавие:	A model of nanosecond laser ablation of compound semiconductors accounting for non-congruent vaporization
Библ. ссылка:	Bulgakova O.A., Bulgakova N.M., Zhukov V.P. A model of nanosecond laser ablation of compound semiconductors accounting for non-congruent vaporization // Applied Physics A: Materials Science & Processing. - 2010. - Vol.101. - P.53-59. - ISSN 0947-8396. - EISSN 1432-0630.
Внешние системы:	DOI: 10.1007/s00339-010-5757-2; РИНЦ: 16711340; SCOPUS: 2-s2.0-78049345250; WoS: 000283097300010;
Реферат:	eng: We report a model of nanosecond laser ablation of compound semiconductors taking into account stoichiometry loss as a result of different volatilities of the material components. The model is based on the heat-flow equation for the bulk material and the diffusion equation for its atomic constituents and takes into account variations of material properties as functions of temperature and composition. Changing the optical response which results from stoichiometry violation is described within the concept of an effective medium and a multi-layer reflection model is applied. For cadmium telluride, as an example, the processes of ablation, melting, and resolidification under the action of a KrF laser have been studied in dynamics for particular experimental conditions in a wide range of laser fluences from the ablation threshold to the plasma shielding regimes described by the effective plasma plume representation. Multi-shot irradiation regimes have been investigated and the mechanism of the irradiation-controlled stoichiometry reversal has been elucidated. © 2010 Springer-Verlag.
Издано:	2010
Физ. характеристика:	с.53-59
Цитирование:	1. C.S. Ferekides U. Balasubramanian R. Mamazza V. Viswanathan H. Zhao D.L. Morel 2004 Sol. Energy 77 823 10.1016/j.solener.2004.05.023 (Pubitemid 39605891) 2. K. Zanio, in Semiconductors and Semimetals, ed. by R.K. Willardson, A.C. Beer, vol. 13 (Academic Press, London, 1978) 3. M. Niraula A. Nakamura T. Aoki Y. Tomita Y. Hatanaka 2002 Phys. Status Solidi B 229 1103 10.1002/1521-3951(200201)229:2<1103::AID-PSSB1103>3.0. CO;2-B 2002PSSBR.229.1103N 4. S. Chandrasekhar 1997 Solid-State Electron. 41 1413 10.1016/S0038- 1101(97)00084-1 1997SSEle..41.1413C 5. N. Gaponik A. Shavel L. Lu A. Eychmüller 2007 Z. Phys. Chem. 221 307 6. F.X. Wagner D. Sands 2000 Thin Solid Films 358 6 10.1016/S0040-6090(99) 00712-9 2000TSF...358....6W (Pubitemid 30526437) 7. I. Ozerov A.V. Bulgakov D.K. Nelson R. Castell W. Marine 2005 Appl. Surf. Sci. 247 1 10.1016/j.apsusc.2005.01.084 2005ApSS..247....1O (Pubitemid 40743433) 8. K.P. Acharya J.R. Skuza R.A. Lukaszev C. Liyanage B. Ullrich 2007 J. Phys., Condens. Matter 19 196221 10.1088/0953-8984/19/19/196221 2007JPCM...19s6221A (Pubitemid 46774766) 9. S. Neretina P. Mascher R.A. Hughes N. Braidy W.H. Gong J.F. Britten J.S. Preston N.V. Sochinskii P. Dippo 2006 Appl. Phys. Lett. 89 133101 10.1063/1.2357033 2006ApPhL..89m3101N (Pubitemid 44484135) 10. P.D. Brewer J.J. Zinck G.L. Olson 1990 Appl. Phys. Lett. 57 2526 10.1063/1.103844 1990ApPhL..57.2526B 11. K. Abe O. Eryu S. Nakashima M. Terai M. Kubo M. Niraula K. Yasuda 2005 J. Electron. Mater. 34 1428 10.1007/s11664-005-0201-7 2005JEMat..34.1428A 12. K.K. Garcia H. Lindner A. von Bohlen C. Vadla K. Niemax 2008 J. Anal. At. Spectrom. 23 470 10.1039/b718845e (Pubitemid 351473865) 13. M.M. Jevtić M.J. Šćepanović 1991 Appl. Phys. A 53 332 10.1007/BF00357197 1991ApPhA..53..332J 14. L.A. Golovan B.A. Markov P.K. Kashkarov V.Y. Timoshenko 1998 Solid State Commun. 108 707 10.1016/S0038-1098(98)00485-2 1998SSCom.108..707G 15. G.D. Ivlev E.I. Gatskevich S.P. Zhvavyi R. Černý P. Přicryl V. Cháb O.E. Cibulka 2004 Proc. SPIE 5449 10 10.1117/12.563082 2004SPIE.5449...10I 16. V.A. Gnatyuk T. Aoki O.S. Gorodnychenko Y. Hatanaka 2003 Appl. Phys. Lett. 83 3704 10.1063/1.1625777 2003ApPhL..83.3704G 17. R. Heregenröder 2006 J. Anal. At. Spectrom. 21 505 10.1039/b600698a 18. S.P. Zhvavyi G.L. Zykov 2006 Appl. Surf. Sci. 253 586 10.1016/j.apsusc.2005.12.116 2006ApSS..253..586Z (Pubitemid 44894181) 19. S.P. Zhvavyi G.L. Zykov 2008 Appl. Surf. Sci. 254 6504 10.1016/j.apsusc.2008.04.016 2008ApSS..254.6504Z 20. A.V. Bulgakov N.M. Bulgakova 1999 Quantum Electron. 29 433 10.1070/QE1999v029n05ABEH001503 1999QuEle..29..433B 21. J.D. Parisse W. Marine M. Sentis 1999 J. Phys. IV 9 149 22. N.M. Bulgakova A.V. Bulgakov L.P. Babich 2004 Appl. Phys. A 79 1323 2004ApPhA..79.1323B 23. S.I. Anisimov 1968 J. Exp. Theor. Phys. 27 182 1968JETP...27..182A 24. R. Fang R.F. Brebrick 1996 J. Phys. Chem. Solids 4 443 10.1016/0022-3697(95)00251-0 (Pubitemid 126373203) 25. E. Ko M.M.G. Alemany J.R. Chelikowsky 2004 J. Chem. Phys. 121 942 10.1063/1.1759612 2004JChPh.121..942K 26. A. Haloui Y. Feutelais B. Legendre 1997 J. Alloys Compd. 260 179 10.1016/S0925-8388(97)00179-5 27. Sh. Furman, A.V. Tikhonravov, Basics of Optics of Multilayer Systems (Editions Frontières, Gif-sur-Yvette, 1992) 28. N.M. Bulgakova A.V. Bulgakov 2001 Appl. Phys. A 73 199 10.1007/s003390000686 2001ApPhA..73..199B 29. N.V. Smith 1967 Adv. Phys. 16 629 10.1080/00018736700101735 1967AdPhy..16..629S 30. J.N. Hodgson 1963 Philos. Mag. 8 735 10.1080/14786436308213832 1963PMag....8..735H 31. V.V. Godlevsky J.J. Derby J.R. Chelikowsky 1998 Phys. Rev. Lett. 81 4959 10.1103/PhysRevLett.81.4959 1998PhRvL..81.4959G 32. V.N. Strekalov 1986 Sov. Phys. Semicond. 20 1939 33. W. Marine N.M. Bulgakova L. Patrone I. Ozerov 2004 Appl. Phys. A 79 771 10.1007/s00339-004-2783-y 2004ApPhA..79..771M 34. W. Marine N.M. Bulgakova L. Patrone I. Ozerov 2008 J. Appl. Phys. 103 094902 10.1063/1.2903527 2008JAP...103i4902M (Pubitemid 351707048) 35. P. Juza W. Faschinger K. Hingerl H. Sitter 1990 Semicond. Sci. Technol. 5 191 10.1088/0268-1242/5/3/001 1990SeScT...5..191J 36. A.V. Bulgakov, A.B. Evtushenko, Private communication