Инд. авторы:	Grigoriev Y.N., Gorobchuk A.G.
Заглавие:	Numerical simulation of plasma-chemical processing semiconductor
Библ. ссылка:	Grigoriev Y.N., Gorobchuk A.G. Numerical simulation of plasma-chemical processing semiconductor: «Micro Electronic and Mechanical Systems», IN-TECH Education and Publishing. - 2009.
Издано:	«Micro Electronic and Mechanical Systems», IN-TECH Education and Publishing, 2009