Инд. авторы:	Malsagova, Pleshakova, Kozlov, Shumov, Ilnitskii, Miakonkikh, Popov, Rudenko, Glukhov, Kupriyanov I.N., Ivanova, Rogozhin, Archakov, Ivanov
Заглавие:	Micro-Raman spectroscopy for monitoring of deposition quality of high-k stack protective layer onto nanowire FET chips for highly sensitive miRNA detection
Библ. ссылка:	Malsagova, Pleshakova, Kozlov, Shumov, Ilnitskii, Miakonkikh, Popov, Rudenko, Glukhov, Kupriyanov I.N., Ivanova, Rogozhin, Archakov, Ivanov Micro-Raman spectroscopy for monitoring of deposition quality of high-k stack protective layer onto nanowire FET chips for highly sensitive miRNA detection // Biosensors. - 2018. - Vol.8. - Iss. 3. - Art.72.
Внешние системы:	DOI: 10.3390/bios8030072; РИНЦ: 35795862; PubMed: 30060476; SCOPUS: 2-s2.0-85054075084; WoS: 000448396500016;
Реферат:	eng: Application of micro-Raman spectroscopy for the monitoring of quality of high-k (h-k) dielectric protective layer deposition onto the surface of a nanowire (NW) chip has been demonstrated. A NW chip based on silicon-on-insulator (SOI) structures, protected with a layer of high-k dielectric ((h-k)-SOI-NW chip), has been employed for highly sensitive detection of microRNA (miRNA) associated with oncological diseases. The protective dielectric included a 2-nm-thick Al2O3 surface layer and a 8-nm-thick HfO2 layer, deposited onto a silicon SOI-NW chip. Such a chip had increased time stability upon operation in solution, as compared with an unprotected SOI-NW chip with native oxide. The (h-k)-SOI-NW biosensor has been employed for the detection of DNA oligonucleotide (oDNA), which is a synthetic analogue of miRNA-21 associated with oncological diseases. To provide biospecificity of the detection, the surface of (h-k)-SOI-NW chip was modified with oligonucleotide probe molecules (oDVA probes) complementary to the sequence of the target biomolecule. Concentration sensitivity of the (h-k)-SOI-NW biosensor at the level of DL similar to 10(-16) M has been demonstrated.
Ключевые слова:	BIOSENSOR; MICRORNA-21; CANCER; SILICON NANOWIRES; ELECTRICAL DETECTION; micro-Raman spectroscopy; nanowire biosensor; high-k dielectric; silicon-on-insulator; miRNA; PROTEINS;
Издано:	2018
Физ. характеристика:	72
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