Инд. авторы:	Gusel’nikov A.V., Safronov A.V., Kurenya A.G., Arkhipov V.E., Bolgarin S.G., Ivanov A.E., Kvashnin A.G., Okotrub A.V.
Заглавие:	A Laboratory CVD Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays
Библ. ссылка:	Gusel’nikov A.V., Safronov A.V., Kurenya A.G., Arkhipov V.E., Bolgarin S.G., Ivanov A.E., Kvashnin A.G., Okotrub A.V. A Laboratory CVD Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays // Instruments and Experimental Techniques. - 2018. - Vol.61. - Iss. 4. - P.604-609. - ISSN 0020-4412. - EISSN 1608-3180.
Внешние системы:	DOI: 10.1134/S002044121804019X; РИНЦ: 35712437; SCOPUS: 2-s2.0-85051059342; WoS: 000440767100023;
Реферат:	rus: The functional structure and the design of a CVD reactor for the synthesis of vertically oriented carbon nanotube (VOCNT) arrays on silicon substrates are described. To synthesize VOCNTs, various organic compounds, viz., toluene, cyclohexane, and acetonitrile, and their mixtures in the liquid state were tested under normal conditions. eng: The functional structure and the design of a CVD reactor for the synthesis of vertically oriented carbon nanotube (VOCNT) arrays on silicon substrates are described. To synthesize VOCNTs, various organic compounds, viz., toluene, cyclohexane, and acetonitrile, and their mixtures in the liquid state were tested under normal conditions.
Ключевые слова:	RADIATION; PYROLYSIS; GROWTH; ALIGNED CARBON; CHEMICAL-VAPOR-DEPOSITION; FILMS; BUNDLES; FORESTS;
Издано:	2018
Физ. характеристика:	с.604-609
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