| Инд. авторы: | Labusov V.A., Semenov Z.V., Zarubin I.A., Saushkin M.S., Erg G.V., Kovalev S.I. |
| Заглавие: | A System for the Spectral Monitoring of the Deposition of Multilayer Dielectric Coatings |
| Библ. ссылка: | Labusov V.A., Semenov Z.V., Zarubin I.A., Saushkin M.S., Erg G.V., Kovalev S.I. A System for the Spectral Monitoring of the Deposition of Multilayer Dielectric Coatings // Measurement techniques . - 2014. - Vol.56. - Iss. 12. - P.1327-1332. - ISSN 0543-1972. - EISSN 1573-8906. |
| Внешние системы: | DOI: 10.1007/s11018-014-0376-5; SCOPUS: 2-s2.0-84899985170; WoS: 000334513900004; |
| Реферат: | eng: A high precision system for monitoring the thicknesses of the layers of multilayer dielectric coatings over a wide spectral range has been constructed. An example of the use of the system to construct an antireflection coating with a maximum reflection coefficient of 0.15% in the 400 - 660 nm spectral range on VU-2M vacuum equipment is presented.
|
| Ключевые слова: | thin films; spectrophotometry; deposition monitoring; multilayer dielectric coatings; |
| Издано: | 2014 |
| Физ. характеристика: | с.1327-1332 |