Инд. авторы:	Terent'ev V.S, Simonov V.A.
Заглавие:	Experimental Method of Fabrication of a Matched Metal-Dielectric Structure for a Sensor Based on the Effect of Frustrated Total Internal Reflection
Библ. ссылка:	Terent'ev V.S, Simonov V.A. Experimental Method of Fabrication of a Matched Metal-Dielectric Structure for a Sensor Based on the Effect of Frustrated Total Internal Reflection // Optoelectronics, Instrumentation and Data Processing. - 2015. - Vol.51. - Iss. 6. - P.609-616. - ISSN 8756-6990. - EISSN 1934-7944.
Внешние системы:	DOI: 10.3103/S8756699015060138; SCOPUS: 2-s2.0-84961384364; WoS: 000421015300013;
Реферат:	eng: An experimental method of fabrication of a sensor based on a metal-dielectric structure (Al + ZnS) and optimization of its characteristics is described. The coefficient of light reflection (p-polarization) from the aluminum layer is studied as a function of the layer thickness for different angles of incidence at the wavelength of 532 nm. Based on calculations, which are qualitatively consistent with experimental results, a structure consisting of matched layers of aluminum and zinc sulfide is fabricated; this structure has a higher angular resolution than the aluminum film with no dielectric coating. The detection limit of angular measurements by the sensor based on this structure is estimated as 2.6 . 10(-5) RIU (refraction index units).
Ключевые слова:	refractive index sensorics; metal dielectric interference structure; thin metal film; frustrated total internal reflection;
Издано:	2015
Физ. характеристика:	с.609-616