| Инд. авторы: | Poleshchuk A.G., Korolkov V.P., Sedukhin A.G., Sametov A.R., Shimanskii R.V. |
| Заглавие: | Direct Laser Writing of Gray-Scale Microimages with a Large Dynamic Range in Chromium Films |
| Библ. ссылка: | Poleshchuk A.G., Korolkov V.P., Sedukhin A.G., Sametov A.R., Shimanskii R.V. Direct Laser Writing of Gray-Scale Microimages with a Large Dynamic Range in Chromium Films // Optoelectronics, Instrumentation and Data Processing. - 2015. - Vol.51. - Iss. 3. - P.287-292. - ISSN 8756-6990. - EISSN 1934-7944. |
| Внешние системы: | DOI: 10.3103/S8756699015030115; SCOPUS: 2-s2.0-84938586871; WoS: 000420996200011; |
| Реферат: | eng: A method for direct laser thermochemical writing of gray-scale microimages in thin chromium films is developed and studied. The method includes exposing a chromium film with a focused laser beam with variable power intensity and developing it in a selective etchant. The range of variation of the transmission by more than 100 times is obtained. The nonlinearity of the dependence of the chromium film transmission on the power intensity of the exposing beam is eliminated by software correction. The samples of the raster (with a size of 64x64 and a step of 176 mu m) of apertures (36 mu m) with the gray-scale Gaussian transmission function are manufactured experimentally. This raster is used in the modified Shack - Hartmann sensor.
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| Ключевые слова: | thermochemical reactions; Shack - Hartmann sensor; laser writing; laser oxidation; apodization; |
| Издано: | 2015 |
| Физ. характеристика: | с.287-292 |