Инд. авторы:	Belousov D.A., Poleshchuk A.G., Khomutov V.N.
Заглавие:	MONITORING A SPATIAL INTENSITY DISTRIBUTION OF TRANSMITTED AND REFLECTED LIGHT IN A DIFFRACTIVE STRUCTURE
Библ. ссылка:	Belousov D.A., Poleshchuk A.G., Khomutov V.N. MONITORING A SPATIAL INTENSITY DISTRIBUTION OF TRANSMITTED AND REFLECTED LIGHT IN A DIFFRACTIVE STRUCTURE // Компьютерная оптика. - 2015. - Vol.39. - Iss. 5. - P.678-686. - ISSN 0134-2452. - EISSN 2412-6179.
Внешние системы:	DOI: 10.18287/0134-2452-2015-39-5-678-686; WoS: 000409680900006;
Реферат:	eng: We propose a method and a design of a device for an on-line monitoring of a spatial intensity distribution of transmitted and reflected diffraction orders found within a +/- 80 degrees solid angle and a 360 degrees azimuthal angle. The proposed device is intended to serve as a shape and depth profiler of the diffractive element microrelief in the course of manufacturing.
Ключевые слова:	diffractive optical elements (DOEs); measuring system; diffractive optics; computer optics; synthesized holograms;
Издано:	2015
Физ. характеристика:	с.678-686