Инд. авторы:	Vyukhin V.N.
Заглавие:	Analysis of the Error of Measuring the Capacity of Semiconductor Structures at a High Frequency
Библ. ссылка:	Vyukhin V.N. Analysis of the Error of Measuring the Capacity of Semiconductor Structures at a High Frequency // Optoelectronics, Instrumentation and Data Processing. - 2015. - Vol.51. - Iss. 5. - P.530-535. - ISSN 8756-6990. - EISSN 1934-7944.
Внешние системы:	DOI: 10.3103/S8756699015050131; SCOPUS: 2-s2.0-84949221543; WoS: 000421011800013;
Реферат:	eng: The error of measuring the capacity of semiconductor structures at a high frequency by an integrator-based measurement circuit is studied theoretically and experimentally. Relations derived for calculating this error allow one to choose the measurement circuit parameters correctly for particular conditions.
Ключевые слова:	integrator; capacity divider; measurement circuit; test signal; measurement error; measuring the capacity of semiconductor structures;
Издано:	2015
Физ. характеристика:	с.530-535