Инд. авторы:	Goldenberg B.G., Knyazev B.A., Gentselev A.N., Lemzyakov A.G., Baev S.G.
Заглавие:	Manufacturing of self-bearing microstructures of the pseudo-metallic type for diffraction experiments in the terahertz range
Библ. ссылка:	Goldenberg B.G., Knyazev B.A., Gentselev A.N., Lemzyakov A.G., Baev S.G. Manufacturing of self-bearing microstructures of the pseudo-metallic type for diffraction experiments in the terahertz range // Proceedings of the International Conference Synchrotron and Free Electron Laser Radiation: Generation and Application (SFR-2016) : International Conference on Synchrotron and Free Electron Laser Radiation - Generation and Application (SFR) (JUL 04-07, 2016). - 2016. - Vol.84. - P.165-169. - ISSN 1875-3892.
Внешние системы:	DOI: 10.1016/j.phpro.2016.11.029; WoS: 000392696400027;
Реферат:	eng: Specific features of the LIGA-technology methods elaborated at the Siberian Synchrotron and Terahertz Radiation Centre (SSTRC, BINP SB RAS) and fabrication of terahertz filters and optical elements based on high-aspect self-bearing microstructures of the pseudo-metallic type are described. The essence of the method consists in deep X-ray lithographic patterning of an organic glass (PMMA) substrate followed by covering its entire surface with a thin layer of metal (silver). The structures produced are using in the experiments at the Novosibirsk free electron laser. (C) 2016 The Authors. Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).
Ключевые слова:	free electron laser; microstructures of the pseudo-metallic type; SURFACE-PLASMONS; Deep X-ray lithography; X-ray masks; teraherttz radiation;
Издано:	2016
Физ. характеристика:	с.165-169
Конференция:	Название: International Conference on Synchrotron and Free Electron Laser Radiation: Generation and Application, SFR 2016 Аббревиатура: SFR 2016 Город: Novosibirsk Страна: Russia Даты проведения: 2016-07-04 - 2016-07-07