| Инд. авторы: | Kir'yanov A.V., Kir'yanov V.P., Volokhov I.V., Bobkov A.V. |
| Заглавие: | Using a circular-scanning method to form and monitor the topology of high-precision photomasks for integrated sensors of optical quantities |
| Библ. ссылка: | Kir'yanov A.V., Kir'yanov V.P., Volokhov I.V., Bobkov A.V. Using a circular-scanning method to form and monitor the topology of high-precision photomasks for integrated sensors of optical quantities // Journal of Optical Technology. - 2016. - Vol.83. - Iss. 7. - P.410-414. - ISSN 1070-9762. - EISSN 1091-0786. |
| Внешние системы: | DOI: 10.1364/JOT.83.000410; WoS: 000392956300006; |
| Реферат: | eng: This paper analyzes the results of forming and monitoring the topology of photomasks for integrated pressure and turning-angle sensors obtained by means of processing and measurement equipment that operates in polar and Cartesian coordinate systems. It is shown that it is advisable to employ equipment that uses a circular-scanning method to enhance the accuracy with which the given items are fabricated and monitored. (C) 2017 Optical Society of America.
|
| Издано: | 2016 |
| Физ. характеристика: | с.410-414 |