| Инд. авторы: | Kiryanov A., Kiryanov V., Chukanov V. |
| Заглавие: | The Use of Hybrid Angular Encoder in The Laser Pattern Generators With Circular Scanning |
| Библ. ссылка: | Kiryanov A., Kiryanov V., Chukanov V. The Use of Hybrid Angular Encoder in The Laser Pattern Generators With Circular Scanning // 2016 13TH INTERNATIONAL SCIENTIFIC-TECHNICAL CONFERENCE ON ACTUAL PROBLEMS OF ELECTRONIC INSTRUMENT ENGINEERING (APEIE), VOL 1 : 13th International Scientific-Technical Conference on Actual Problems of Electronics Instrument Engineering (APEIE) (OCT 03-06, 2016). - 2016. - P.232-236. - ISBN 978-1-5090-4069-8. - ISSN 2473-8565. |
| Внешние системы: | DOI: 10.1109/APEIE.2016.7802262; SCOPUS: 2-s2.0-85020702594; WoS: 000392622500059; |
| Реферат: | eng: The error of positioning in the angular direction is rather specific and typical only for laser pattern generators with a circular scanning containing a mechatronic rotation unit with a built in angle encoder. The error of this encoder is particularly important for formation of topology of angle measuring structures, such as angular rasters, limbs, scales, or multibit code disks, and for synthesis of topology of arbitrarily shaped diffractive optical elements, especially at large radii. The method of improvement the accuracy of laser pattern generator with circular scanning is proposed. The result is achieved by using hybrid angular encoder in it. Its using allows to measure the turning angle and current radial deflections of the rotor axis simultaneously. For that two measuring patterns: a radial raster for measuring the angular displacement and a ring one for measuring the linear shift in a tangential direction are formed on a single glass basis. It is shown that optoelectronic angle encoder of the hybrid type allows to reduce the error of the synthesis of the topology of microstructures up to several tenths of arc seconds, which are caused by metrological characteristics of checking machine used for certification of the measuring raster of the encoder. |
| Ключевые слова: | hybrid angular encoder; mechatronic module; optoelectronic angular encoder; laser pattern generator with circular scanning mode; |
| Издано: | 2016 |
| Физ. характеристика: | с.232-236 |
| Конференция: | Название: 13th International Scientific-Technical Conference on Actual Problems of Electronic Instrument Engineering, APEIE 2016 Аббревиатура: APEIE 2016 Город: Novosibirsk Страна: Russia Даты проведения: 2016-10-03 - 2016-10-06 |