Инд. авторы:	Kir'yanov V.P, Nikitin V.G.
Заглавие:	Modeling of the Formation of Steep Portions of a Piecewise Continuous Profile in a One-Step Technology for Fabricating Diffractive Optical Elements using Oblique Laser Beams
Библ. ссылка:	Kir'yanov V.P, Nikitin V.G. Modeling of the Formation of Steep Portions of a Piecewise Continuous Profile in a One-Step Technology for Fabricating Diffractive Optical Elements using Oblique Laser Beams // Optoelectronics, Instrumentation and Data Processing. - 2017. - Vol.53. - Iss. 6. - P.548-553. - ISSN 8756-6990. - EISSN 1934-7944.
Внешние системы:	DOI: 10.3103/S8756699017060024; SCOPUS: 2-s2.0-85042685045; WoS: 000426595800002;
Реферат:	eng: This paper presents the results of modeling the most important component of a one-step technology of fabricating kinoform lenses in thick photoresist layers with increased diffraction efficiency due to the formation of backward slopes of Fresnel zones with a steepness of up to 90 degrees using oblique laser beams. It is shown that this method of fabricating volume structures makes it possible to significantly increase the steepness of backward slopes of the zones in low-contrast photoresists (k = 3) and to form practically vertical slopes in moderate-contrast photoresists (k = 10).
Ключевые слова:	oblique beams; backward slopes of diffraction zones; photoresist contrast; diffractive optical element profiles; writing technology; diffraction efficiency;
Издано:	2017
Физ. характеристика:	с.548-553