Инд. авторы:	Veiko V., Korolkov V., Poleshchuk A., Sinev D., Shakhno E.
Заглавие:	Laser Technologies in Micro-Optics. Part 1. Fabrication of Diffractive Optical Elements and Photomasks with Amplitude Transmission
Библ. ссылка:	Veiko V., Korolkov V., Poleshchuk A., Sinev D., Shakhno E. Laser Technologies in Micro-Optics. Part 1. Fabrication of Diffractive Optical Elements and Photomasks with Amplitude Transmission // Optoelectronics, Instrumentation and Data Processing. - 2017. - Vol.53. - Iss. 5. - P.474-483. - ISSN 8756-6990. - EISSN 1934-7944.
Внешние системы:	DOI: 10.3103/S8756699017050077; SCOPUS: 2-s2.0-85038088714; WoS: 000418124100007;
Реферат:	eng: This paper is a review of studies carried out by the staff of the National Research University of Information Technologies, Mechanics and Optics (ITMO University, Saint-Petersburg) and the Institute of Automation and Electrometry of the Siberian Branch of the Russian Academy of Sciences (IAE SB RAS, Novosibirsk) in the field of development of laser engineering processes for the formation of the structure of diffractive optical elements (DOEs) and photomasks with amplitude binary and grayscale transmission. This paper also describes the results of the study of laser thermochemical technology for fabricating chrome DOEs and technologies for the fabrication of grayscale DOEs and photomasks based on the use of amorphous silicon and LDW glass.
Ключевые слова:	CHROMIUM FILMS; THERMOCHEMICAL TECHNOLOGY; THIN METAL-FILMS; grayscale photomasks; RADIATION; amorphous silicon; laser writing; thermochemistry; laser technology; LDW glass; RESOLUTION;
Издано:	2017
Физ. характеристика:	с.474-483