Инд. авторы:	Mironnikov N., Korolkov V., Derevyanko D., Shelkovnikov V.
Заглавие:	Study of the Optical Methods of Formation of Multilevel Profile in the Thin Films of a Hybrid Photopolymer Material Based on Thiol-Siloxane and Acrylate Oligomers
Библ. ссылка:	Mironnikov N., Korolkov V., Derevyanko D., Shelkovnikov V. Study of the Optical Methods of Formation of Multilevel Profile in the Thin Films of a Hybrid Photopolymer Material Based on Thiol-Siloxane and Acrylate Oligomers // Optoelectronics, Instrumentation and Data Processing. - 2017. - Vol.53. - Iss. 5. - P.466-473. - ISSN 8756-6990. - EISSN 1934-7944.
Внешние системы:	DOI: 10.3103/S8756699017050065; WoS: 000418124100006;
Реферат:	eng: This paper describes a study of the optical methods for fabrication of multilevel profile in the layers of a Hybrimer-TATS hybrid photopolymer material based on thiol-siloxane and acrylate oligomers. Grayscale photolithography and direct laser writing are used to form multilevel structures 3.5 and 6 mu in height, respectively. The characteristic curves and photosensitivity of the material are determined. The film preparation and treatment processes are optimized, and it is determined that addition of the stages of pre- and post-exposure significantly affects the photosensitive properties of Hybrimer-TATS. The photopolymer is promising as a structural material for the formation of microstructured optical components.
Ключевые слова:	ELEMENTS; characteristic curve; multilevel diffractive structures; photolithography; laser writing; thiol-siloxane-acrylate oligomers; hybrid photopolymer; FABRICATION;
Издано:	2017
Физ. характеристика:	с.466-473