Инд. авторы:	Gentselev A.N., Kuznetsov S.A., Baev S.G., Goldenberg B.G., Lonshakov E.A.
Заглавие:	Fabrication of Quasi-Optical Selective Elements for the Terahertz Range in the Form of Pseudometallic Structures Via Deep X-ray Lithography
Библ. ссылка:	Gentselev A.N., Kuznetsov S.A., Baev S.G., Goldenberg B.G., Lonshakov E.A. Fabrication of Quasi-Optical Selective Elements for the Terahertz Range in the Form of Pseudometallic Structures Via Deep X-ray Lithography // Journal of Surface Investigation: X-Ray, Synchrotron and Neutron Techniques. - 2017. - Vol.11. - Iss. 4. - P.710-720. - ISSN 1027-4510. - EISSN 1819-7094.
Внешние системы:	DOI: 10.1134/S1027451017040073; WoS: 000409172900005;
Реферат:	eng: A technique for fabricating self-bearing pseudometallic structures, which hold promise for utilization as quasi-optical frequency-selective elements in the terahertz range of the electromagnetic spectrum, is discussed. The technique is based on microstructuring a continuous dielectric layer via stencilled X-ray lithography involving synchrotron radiation with subsequent metallization of the entire structure surface. The main manufacturing schemes are described, including fabrication of the initial substrates and X-ray masks. Examples of samples of the produced selective elements, such as frequency filters and flat lenses, as well as their operating characteristics, are presented.
Ключевые слова:	WAVES; RADIATION; SUBTERAHERTZ; FILTERS; ELECTRON-BEAM; planar lens; LIGA; terahertz radiation; pseudometallic structure; laser microtreatment (cutting); X-ray mask; synchrotron radiation; deep X-ray lithography; high-pass filter; MASKS;
Издано:	2017
Физ. характеристика:	с.710-720