Инд. авторы:	Shimansky R.V., Poleshchuk A.G., Korolkov V.P., Cherkashin V.V.
Заглавие:	Dynamic Correction of the Laser Beam Coordinate in Fabrication of Large-Sized Diffractive Elements for Testing Aspherical Mirrors
Библ. ссылка:	Shimansky R.V., Poleshchuk A.G., Korolkov V.P., Cherkashin V.V. Dynamic Correction of the Laser Beam Coordinate in Fabrication of Large-Sized Diffractive Elements for Testing Aspherical Mirrors // Optoelectronics, Instrumentation and Data Processing. - 2017. - Vol.53. - Iss. 3. - P.255-263. - ISSN 8756-6990. - EISSN 1934-7944.
Внешние системы:	DOI: 10.3103/S8756699017030098; SCOPUS: 2-s2.0-85027040905; WoS: 000409138900009;
Реферат:	eng: This paper presents a method of improving the accuracy of a circular laser system in fabrication of large-diameter diffractive optical elements by means of a polar coordinate system and the results of their use. An algorithm for correcting positioning errors of a circular laser writing system developed at the Institute of Automation and Electrometry, SB RAS, is proposed and tested. High-precision synthesized holograms fabricated by this method and the results of using these elements for testing the 6.5 m diameter aspheric mirror of the James Webb space telescope (JWST) are described..
Ключевые слова:	nanopositioning; laser writing; diffractive optical elements;
Издано:	2017
Физ. характеристика:	с.255-263