| Инд. авторы: | Bessmelsev V.P., Bulushev E.D., Dostovalov A.V. |
| Заглавие: | Optical inspection of microchannels formed by femtosecond laser on glass |
| Библ. ссылка: | Bessmelsev V.P., Bulushev E.D., Dostovalov A.V. Optical inspection of microchannels formed by femtosecond laser on glass // 2014 INTERNATIONAL CONFERENCE LASER OPTICS: International Conference on Laser Optics (JUN 30-JUL 04, 2014). - 2014. |
| Внешние системы: | WoS: 000360494300140; |
| Реферат: | eng: The aim of the research was to provide precise inspection of surface of optically transparent materials micromachined by a femtosecond laser. We found that despite the fact that pulse durations are in a femtosecond range in case of non optimal processing modes cleavages may be formed at the border of heat affected zone, and profiles of micro channel are not uniform. For measurement of micro channels the optical inspection technique based on fluorescent confocal laser scanning microscopy and data analysis algorithms was developed. |
| Ключевые слова: | image processing; femtosecond laser micromachining; fluorescence microscopy; confocal microscopy; |
| Издано: | 2014 |
| Конференция: | Название: 2014 International Conference Laser Optics Аббревиатура: LO 2014 Город: St. Petersburg Страна: Russia Даты проведения: 2014-06-30 - 2014-07-04 |