Инд. авторы:	Shimanskii R.V., Poleshchuk A.G., Korolkov V.P., Cherkashin V.V.
Заглавие:	Alignment of the Writing Beam with the Diffractive Structure Rotation Axis in Synthesis of Diffractive Optical Elements in a Polar Coordinate System
Библ. ссылка:	Shimanskii R.V., Poleshchuk A.G., Korolkov V.P., Cherkashin V.V. Alignment of the Writing Beam with the Diffractive Structure Rotation Axis in Synthesis of Diffractive Optical Elements in a Polar Coordinate System // Optoelectronics, Instrumentation and Data Processing. - 2017. - Vol.53. - Iss. 2. - P.123-130. - ISSN 8756-6990. - EISSN 1934-7944.
Внешние системы:	DOI: 10.3103/S8756699017020030; SCOPUS: 2-s2.0-85020935012; WoS: 000409138100003;
Реферат:	eng: A method is developed to ensure precise alignment of the origin of a polar coordinate system in which the laser beam position is defined in writing diffractive optical elements with the optical workpiece rotation axis. This method is used to improve the accuracy of a circular laser writing system in writing large-scale diffractive optical elements in a polar coordinate system. Results of studying new algorithms of detection and correction of positioning errors of the circular laser writing system in the course of writing are reported.
Ключевые слова:	LASER THERMOCHEMICAL TECHNOLOGY; determination of the optical workpiece rotation axis; nanopositioning; diffractive optical elements; laser writing; CHROMIUM FILMS;
Издано:	2017
Физ. характеристика:	с.123-130