| Инд. авторы: | Dostovalov A.V., Korolkov V.P., Terentiev V.S., Okotrub K.A., Dultsev F.N., Nemykin A.V., Babin S.A. |
| Заглавие: | Study of TLIPSS formation on different metals and alloys and their selective etching |
| Библ. ссылка: | Dostovalov A.V., Korolkov V.P., Terentiev V.S., Okotrub K.A., Dultsev F.N., Nemykin A.V., Babin S.A. Study of TLIPSS formation on different metals and alloys and their selective etching // Proceedings of SPIE - The International Society for Optical Engineering. - 2017. - Vol.10092. - Art.UNSP 100921H. - ISSN 0277-786X. |
| Внешние системы: | DOI: 10.1117/12.2251341; WoS: 000404401100033; |
| Реферат: | eng: Experimental investigation of thermochemical laser-induced periodic surface structures (TLIPSS) formation on metal films (Ti, Cr, Ni, NiCr) at different processing conditions is presented. The hypothesis that the TLIPSS formation depends significantly on parabolic rate constant for oxide thin film growth is discussed. Evidently, low value of this parameter for Ni is the reason of TLIPSS absence on Ni and NiCr film with low Cr content. The effect of simultaneous ablative (with period approximate to lambda/3) and thermochemical (with period approximate to lambda) LIPSS formation was observed. The formation of structures after TLIPSS selective etching was demonstrated.
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| Ключевые слова: | femtosecond laser; thin metal films; thermochemical modification; LIPSS; |
| Издано: | 2017 |