Инд. авторы:	Plekhanov A.G., Fainer N.I., Rumyantsev Y.M., Yushina I.V., Rakhmanova M.I.
Заглавие:	The phase composition and physicochemical properties of transparent nanocomposite films of silicon oxycarbonitride
Библ. ссылка:	Plekhanov A.G., Fainer N.I., Rumyantsev Y.M., Yushina I.V., Rakhmanova M.I. The phase composition and physicochemical properties of transparent nanocomposite films of silicon oxycarbonitride // Journal of Structural Chemistry. - 2016. - Vol.57. - Iss. 6. - P.1209-1215. - ISSN 0022-4766. - EISSN 1573-8779.
Внешние системы:	DOI: 10.1134/S0022476616060226; SCOPUS: 2-s2.0-85010674437;
Реферат:	eng: Films of hydrogenated SiCxNyOz:H obtained by plasma-enhanced chemical vapor deposition from a mixture of 1,1,3,3-tetramethyldisilazane with oxygen and nitrogen (TMDS+ O2+xN2) in the temperature range 373-973 K are nanocomposites in whose amorphous part nanocrystals belonging to phases of the Si–C–N: α-Si3–xCxN4 system and graphite are distributed. A change in the chemical composition of gas mixtures enables the preparation of SiCxNyOz:H films with a broad variation range of functional properties, such as the 1.45-2.15 variation of the refractive index; the controlled transparency (T ~ 92-99.7%) in the UV, visible, and IR spectral ranges; tunable characteristics of the band gap (3.5-5.4 eV), and dielectric constants (5.2-5.8). © 2016, Pleiades Publishing, Ltd.
Ключевые слова:	powder X-ray diffraction analysis with synchrotron radiation; optical; nanocomposite films; silicon oxycarbonitride; and luminescent properties; 1,1,3,3-tetramethyldisilazane; electrophysical;
Издано:	2016
Физ. характеристика:	с.1209-1215