Инд. авторы: Bulgakova N.M., Zhukov V.P., Sonina S.V., Meshcheryakov Y.P.
Заглавие: Modification of transparent materials with ultrashort laser pulses: What is energetically and mechanically meaningful?
Библ. ссылка: Bulgakova N.M., Zhukov V.P., Sonina S.V., Meshcheryakov Y.P. Modification of transparent materials with ultrashort laser pulses: What is energetically and mechanically meaningful? // Journal of Applied Physics. - 2015. - Vol.118. - Iss. 23. - Art.233108. - ISSN 0021-8979. - EISSN 1089-7550.
Внешние системы: DOI: 10.1063/1.4937896; РИНЦ: 26840465; SCOPUS: 2-s2.0-84952837721; WoS: 000367376600008;
Реферат: eng: A comprehensive analysis of laser-induced modification of bulk glass by single ultrashort laser pulses is presented which is based on combination of optical Maxwell-based modeling with thermoelastoplastic simulations of post-irradiation behavior of matter. A controversial question on free electron density generated inside bulk glass by ultrashort laser pulses in modification regimes is addressed on energy balance grounds. Spatiotemporal dynamics of laser beam propagation in fused silica have been elucidated for the regimes used for direct laser writing in bulk glass. 3D thermoelastoplastic modeling of material relocation dynamics under laser-induced stresses has been performed up to the microsecond timescale when all motions in the material decay. The final modification structure is found to be imprinted into material matrix already at sub-nanosecond timescale. Modeling results agree well with available experimental data on laser light transmission through the sample and the final modification structure. © 2015 AIP Publishing LLC.
Ключевые слова: Ultrashort pulses; Comprehensive analysis; Behavior of matters; Light transmission; Laser pulses; Laser beams; Glass; Fused silica; Electrons; Free-electron density; Laser induced modification; Laser-induced stress; Spatio-temporal dynamics; Transparent material; Direct laser writing;
Издано: 2015
Физ. характеристика: 233108
Цитирование: 1. K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, Opt. Lett. 21, 1729 (1996). 10.1364/OL.21.001729 2. R. R. Gattass and E. Mazur, Nat. Photonics 2, 219 (2008). 10.1038/nphoton.2008.47 3. P. A. Temple and M. J. Soileau, IEEE J. Quantum Electron. 17, 2067 (1981). 10.1109/JQE.1981.1070638 4. N. C. Kerr, B. A. Omar, S. E. Clark, and D. C. Emmony, J. Phys. D 23, 884 (1990). 10.1088/0022-3727/23/7/020 5. J. Gottmann, D. Wortmann, and M. Hörstmann-Jungemann, Appl. Surf. Sci. 255, 5641 (2009). 10.1016/j.apsusc.2008.10.097 6. B. Dusser, Z. Sagan, H. Soder, N. Faure, J. P. Colombier, M. Jourlin, and E. Audouard, Opt. Express 18, 2913 (2010). 10.1364/OE.18.002913 7. S. K. Das, K. Dasari, A. Rosenfeld, and R. Grunwald, Nanotechnology 21, 155302 (2010). 10.1088/0957-4484/21/15/155302 8. J. Bonse, J. Krüger, S. Höhm, and A. Rosenfeld, J. Laser Appl. 24, 042006 (2012). 10.2351/1.4712658 9. R. Buividas, M. Mikutis, and S. Juodkazis, Prog. Quantum Electron. 38, 119 (2014). 10.1016/j.pquantelec.2014.03.002 10. Y. Shimotsuma, P. G. Kazansky, J. R. Qiu, and K. Hirao, Phys. Rev. Lett. 91, 247405 (2003). 10.1103/PhysRevLett.91.247405 11. V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, Phys. Rev. Lett. 96, 057404 (2006). 10.1103/PhysRevLett.96.057404 12. G. Cheng, K. Mishchik, C. Mauclair, E. Audouard, and R. Stoian, Opt. Express 17, 9515 (2009). 10.1364/OE.17.009515 13. S. Richter, A. Plech, M. Steinert, M. Heinrich, S. Döring, F. Zimmermann, U. Peschel, E. B. Kley, A. Tünnermann, and S. Nolte, Laser Photon. Rev. 6, 787 (2012). 10.1002/lpor.201200048 14. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Appl. Phys. Lett. 71, 3329 (1997). 10.1063/1.120327 15. C. B. Schaffer, A. Brodeur, J. F. García, and E. Mazur, Opt. Lett. 26, 93 (2001). 10.1364/OL.26.000093 16. Z. Wang, K. Sugioka, Y. Hanada, and K. Midorikawa, Appl. Phys. A 88, 699 (2007). 10.1007/s00339-007-4030-9 17. V. Diez-Blanco, J. Siegel, and J. Solis, Appl. Surf. Sci. 252, 4523 (2006). 10.1016/j.apsusc.2005.07.155 18. I. M. Burakov, N. M. Bulgakova, R. Stoian, A. Mermillod-Blondin, E. Audouard, A. Rosenfeld, A. Husakou, and I. V. Hertel, J. Appl. Phys. 101, 043506 (2007). 10.1063/1.2436925 19. A. Mermillod-Blondin, I. M. Burakov, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, A. Rosenfeld, A. Husakou, I. V. Hertel, and R. Stoian, Phys. Rev. B 77, 104205 (2008). 10.1103/PhysRevB.77.104205 20. B. Poumellec, M. Lankry, R. Desmarchelier, E. Harve, F. Bisset, and J. C. Poulin, Opt. Mater. Express 3, 1586 (2013). 10.1364/OME.3.001586 21. E. N. Glezer and E. Mazur, Appl. Phys. Lett. 71, 882 (1997). 10.1063/1.119677 22. W. Watanabe and K. Itoh, Opt. Express 10, 603 (2002). 10.1364/OE.10.000603 23. S. Juodkazis, K. Nishimura, S. Tanaka, H. Misawa, E. G. Gamaly, B. Luther-Davies, L. Hallo, P. Nicolai, and V. T. Tikhonchuk, Phys. Rev. Lett. 96, 166101 (2006). 10.1103/PhysRevLett.96.166101 24. R. Graf, A. Fernandez, M. Dubov, H. J. Brueckner, B. N. Chichkov, and A. Apolonski, Appl. Phys. A 87, 21 (2007). 10.1007/s00340-006-2480-y 25. H. Y. Sun, J. Song, C. B. Li, J. Xu, X. S. Wang, Y. Cheng, Z. Z. Xu, J. R. Qiu, and T. Q. Jia, Appl. Phys. A 88, 285 (2007). 10.1007/s00339-007-4012-y 26. A. Mermillod-Blondin, J. Bonse, A. Rosenfeld, I. V. Hertel, Y. P. Meshcheryakov, N. M. Bulgakova, E. Audouard, and R. Stoian, Appl. Phys. Lett. 94, 041911 (2009). 10.1063/1.3070522 27. M. Beresna, M. Gecevičius, N. M. Bulgakova, and P. G. Kazansky, Opt. Express 19, 18989 (2011). 10.1364/OE.19.018989 28. R. Buividas, G. Gervinskas, A. Tadich, B. C. C. Cowie, V. Mizeikis, A. Vailionis, D. de Ligny, E. G. Gamaly, A. V. Rode, and S. Juodkazis, Adv. Eng. Mater. 16, 767 (2014). 10.1002/adem.201400091 29. L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, Opt. Commun. 171, 279 (1999). 10.1016/S0030-4018(99)00562-3 30. G. D. Marshall, M. Ams, and M. J. Withford, Opt. Lett. 31, 2690 (2006). 10.1364/OL.31.002690 31. M. Beresna and P. G. Kazansky, Opt. Lett. 35, 1662 (2010). 10.1364/OL.35.001662 32. T. Getus, A. Michailovas, K. Michailovas, and V. Petrauskiene, Proc. SPIE 9343, 93431S (2015). 10.1117/12.2075869 33. J. Liu, Z. Zhang, S. Chang, C. Flueraru, and C. P. Grover, Opt. Commun. 253, 315 (2005). 10.1016/j.optcom.2005.04.082 34. A. M. Streltsov and N. F. Borrelli, Opt. Lett. 26, 42 (2001). 10.1364/OL.26.000042 35. K. Minoshima, A. M. Kowalevicz, E. P. Ippen, and J. G. Fujimoto, Opt. Express 10, 645 (2002). 10.1364/OE.10.000645 36. R. Osellame, S. Taccheo, G. Cerullo, M. Marangoni, D. Polli, R. Ramponi, P. Laporta, and S. De Silvestri, Electron. Lett. 38, 964 (2002). 10.1049/el:20020649 37. E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T. H. Her, J. P. Callan, and E. Mazur, Opt. Lett. 21, 2023 (1996). 10.1364/OL.21.002023 38. R. Taylor, C. Hnatovsky, and E. Simova, Laser Photonics Rev. 2, 26 (2008). 10.1002/lpor.200710031 39. J. Y. Zhang, M. Gecevicius, M. Beresna, and P. G. Kazansky, Phys. Rev. Lett. 112, 033901 (2014). 10.1103/PhysRevLett.112.033901 40. W. J. Cai, A. R. Libertun, and R. Piestun, Opt. Express 14, 3785 (2006). 10.1364/OE.14.003785 41. A. Couairon, L. Sudrie, M. Franco, B. Prade, and A. Mysyrowicz, Phys. Rev. B 71, 125435 (2005). 10.1103/PhysRevB.71.125435 42. A. Couairon and A. Mysyrowicz, Phys. Rep. 441, 47 (2007). 10.1016/j.physrep.2006.12.005 43. J. R. Gulley, S. W. Winkler, W. M. Dennis, C. M. Liebig, and R. Stoian, Phys. Rev. A 85, 013808 (2012). 10.1103/PhysRevA.85.013808 44. J. del Hoyo, A. Ruiz de la Cruz, E. Grace, J. Siegel, A. Pasquazi, G. Assanto, and J. Solis, Sci. Rep. 5, 7650 (2015). 10.1038/srep07650 45. K. I. Popov, C. McElcheran, K. Briggs, S. Mack, and L. Ramunno, Opt. Express 19, 271 (2011). 10.1364/OE.19.000271 46. J. R. Peñano, P. Sprangle, B. Hafizi, W. Manheimer, and A. Zigler, Phys. Rev. E 72, 036412 (2005). 10.1103/PhysRevE.72.036412 47. G. M. Petrov and J. Davis, J. Phys. B: At. Mol. Opt. Phys. 41, 025601 (2008). 10.1088/0953-4075/41/2/025601 48. L. Hallo, A. Bourgeade, V. T. Tikhonchuk, C. Mezel, and J. Breil, Phys. Rev. B 76, 024101 (2007). 10.1103/PhysRevB.76.024101 49. H. Schmitz and V. Mezentsev, J. Opt. Soc. Am. B 29, 1208 (2012). 10.1364/JOSAB.29.001208 50. G. Duchateau and A. Bourgeade, Phys. Rev. A 89, 053837 (2014). 10.1103/PhysRevA.89.053837 51. D. M. Rayner, A. Naumov, and P. B. Corkum, Opt. Express 13, 3208 (2005). 10.1364/OPEX.13.003208 52. S. M. Eaton, H. Zhang, and P. R. Herman, Opt. Express 13, 4708 (2005). 10.1364/OPEX.13.004708 53. M. Shimizu, M. Sakakura, M. Ohnishi, Y. Shimotsuma, T. Nakaya, K. Miura, and K. Hirao, J. Appl. Phys. 108, 073533 (2010). 10.1063/1.3483238 54. M. Sakakura, T. Tochio, M. Eida, Y. Shimotsuma, S. Kanehira, M. Nishi, K. Miura, and K. Hirao, Opt. Express 19, 17780 (2011). 10.1364/OE.19.017780 55. M. Sakakura, Y. Shimotsuma, N. Fukuda, and K. Miura, J. Appl. Phys. 118, 023106 (2015). 10.1063/1.4926614 56. N. M. Bulgakova, V. P. Zhukov, and Yu. P. Meshcheryakov, Appl. Phys. B 113, 437 (2013). 10.1007/s00340-013-5488-0 57. N. M. Bulgakova, V. P. Zhukov, Yu. P. Meshcheryakov, L. Gemini, J. Brajer, DE. Rostohar, and T. Mocek, J. Opt. Soc. Am. B 31, C8 (2014). 10.1364/JOSAB.31.0000C8 58. Yu. P. Meshcheryakov, M. V. Shugaev, T. Mattle, T. Lippert, and N. M. Bulgakova, Appl. Phys. A 113, 521 (2013). 10.1007/s00339-013-7563-0 59. R. Buschlinger, S. Nolte, and U. Peschel, Phys. Rev. B 89, 184306 (2014). 10.1103/PhysRevB.89.184306 60. M. Beresna, M. Gecevičius, P. G. Kazansky, T. Taylor, and A. Kavokin, Appl. Phys. Lett. 101, 053120 (2012). 10.1063/1.4742899 61. B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. Lett. 74, 2248 (1995). 10.1103/PhysRevLett.74.2248 62. F. Quéré, S. Guizard, and Ph. Martin, Europhys. Lett. 56, 138 (2001). 10.1209/epl/i2001-00499-9 63. R. Temam and A. Miranville, Mathematical Modeling in Continuum Mechanics (Cambridge University Press, UK, 2005). 64. T. Brabec and F. Krausz, Phys. Rev. Lett. 78, 3282 (1997). 10.1103/PhysRevLett.78.3282 65. A. L. Gaeta, Phys. Rev. Lett. 84, 3582 (2000). 10.1103/PhysRevLett.84.3582 66. E. Yablonovitch and N. Bloembergen, Phys. Rev. Lett. 29, 907 (1972). 10.1103/PhysRevLett.29.907 67. C. Mézel, A. Bourgeade, and L. Hallo, Phys. Plasmas 17, 113504 (2010). 10.1063/1.3510477 68. K. Sokolowski-Tinten and D. von der Linde, Phys. Rev. B 61, 2643 (2000). 10.1103/PhysRevB.61.2643 69. N. Itoh, T. Shimizu-Iwayama, and T. Fujita, J. Non-Cryst. Solids 179, 194 (1994). 10.1016/0022-3093(94)90697-1 70. S. Guizard, P. Martin, P. D'Oliveira, and P. Maynadier, J. Phys.: Condens. Matter 8, 1281 (1996). 10.1088/0953-8984/8/9/018 71. S. Richter, F. Jia, M. Heinrich, S. Döring, U. Peschel, A. Tünnermann, and S. Nolte, Opt. Lett. 37, 482 (2012). 10.1364/OL.37.000482 72. G. Petite, S. Guizard, P. Martin, and F. Quéré, Phys. Rev. Lett. 83, 5182 (1999). 10.1103/PhysRevLett.83.5182 73. R. E. Schenker and W. G. Oldham, J. Appl. Phys. 82, 1065 (1997). 10.1063/1.365872 74. J. P. Vigouroux, J. P. Duraud, A. Le Moel, C. Le Gressus, and D. L. Griscom, J. Appl. Phys. 57, 5139 (1985). 10.1063/1.335247 75. P. Martin, S. Guizard, P. Daguzan, G. Petite, P. D'Oliveira, P. Meynadier, and M. Perdrix, Phys. Rev. B 55, 5799 (1997). 10.1103/PhysRevB.55.5799 76. J. R. Gulley, S. W. Winkler, and W. M. Dennis, Opt. Eng. 47, 054302 (2008). 10.1117/1.2919721 77. D. Puerto, J. Siegel, W. Gawelda, M. Galvan-Sosa, L. Ehrentraut, J. Bonse, and J. Solis, J. Opt. Soc. Am. B 27, 1065 (2010). 10.1364/JOSAB.27.001065 78. V. V. Temnov, K. Sokolowski-Tinten, P. Zhou, B. Rethfeld, V. E. Gruzdev, A. El-Khamawy, and D. von der Linde, Proc. SPIE 5448, 1119 (2004). 10.1117/12.547145 79. D. G. Papazoglow, I. Zergioti, and S. Tsortzakis, Opt. Lett. 32, 2055 (2007). 10.1364/OL.32.002055 80. A. Royon, " Non-linear femtosecond near infrared laser structuring in oxide glasses," Ph.D. dissertation (CREOL, The College of Optics and Photonics, 2009). 81. M. V. Fischetti, D. J. DiMaria, S. D. Brorson, T. N. Theis, and J. R. Kirtley, Phys. Rev. B 31, 8124 (1985). 10.1103/PhysRevB.31.8124 82. A. Kaiser, B. Rethfeld, M. Vicanek, and G. Simon, Phys. Rev. B 61, 11437 (2000). 10.1103/PhysRevB.61.11437 83. M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, Phys. Rev. B 71, 115109 (2005). 10.1103/PhysRevB.71.115109 84. V. E. Gruzdev, Phys. Rev. B 75, 205106 (2007). 10.1103/PhysRevB.75.205106 85. D. Arnold, E. Cartier, and D. J. DiMaria, Phys. Rev. B 45, 1477 (1992). 10.1103/PhysRevB.45.1477 86. X. Mao, S. S. Mao, R. E. Russo, G. Petite, and P. Martin, Appl. Phys. Lett. 82, 697 (2003). 10.1063/1.1541947 87. L. Sudrie, A. Couairon, M. Franco, B. Lamouroux, B. Prade, S. Tzortzakis, and A. Mysyrowicz, Phys. Rev. Lett. 89, 186601 (2002). 10.1103/PhysRevLett.89.186601 88. A. Q. Wu, I. H. Chowdhury, and X. Xu, Phys. Rev. B 72, 085128 (2005). 10.1103/PhysRevB.72.085128 89. Q. Sun, H. Jiang, Y. Liu, Z. Wu, H. Yang, and Q. Gong, Opt. Lett. 30, 320 (2005). 10.1364/OL.30.000320 90. A. Mermillod-Blondin, C. Mauclair, J. Bonse, R. Stoian, E. Audouard, A. Rosenfeld, and I. V. Hertel, Rev. Sci. Instrum. 82, 033703 (2011). 10.1063/1.3527937 91. M. A. Ordal, R. J. Bell, R. W. Alexander, Jr., L. L. Long, and M. R. Querry, Appl. Optics 24, 4493 (1985). 10.1364/AO.24.004493 92. R. S. Fletcher, X. L. Zhang, and S. L. Rolston, Phys. Rev. Lett. 96, 105003 (2006). 10.1103/PhysRevLett.96.105003 93. S. E. Kirkwood, Y. Y. Tsui, R. Fedosejevs, A. V. Brantov, and V. Yu. Bychenkov, Phys. Rev. B 79, 144120 (2009). 10.1103/PhysRevB.79.144120 94. N. M. Bulgakova, R. Stoian, and A. Rosenfeld, Quantum Electron. 40, 966 (2010). 10.1070/QE2010v040n11ABEH014445 95. J. Bok and M. Combescot, Phys. Rev. Lett. 47, 1564 (1981). 10.1103/PhysRevLett.47.1564 96. M. Sakakura, M. Terazima, Y. Shimotsuma, K. Miyra, and K. Hirao, J. Appl. Phys. 109, 023503 (2011). 10.1063/1.3533431 97. O. Novák, T. Miura, M. Smrž, J. Huynh, P. Severova, A. Endo, and T. Mocek, Proc. SPIE 9135, 91350 I (2014). 10.1117/12.2052199 98. C. V. Shank, R. Yen, and C. Hirlimann, Phys. Rev. Lett. 50, 454 (1983). 10.1103/PhysRevLett.50.454 99. Y. Hayasaki, M. Isaka, and A. Takita, AIP Conf. Proc. 1236, 454 (2010). 10.1063/1.3426159 100. D. Grojo, M. Gertsvolf, S. Lei, T. Barillot, D. M. Rayner, and P. B. Corkum, Phys. Rev. B 81, 212301 (2010). 10.1103/PhysRevB.81.212301 101. J. Siegel, K. Ettrich, E. Welsch, and E. Matthias, Appl. Phys. A 64, 213 (1997). 10.1007/s003390050468 102. Y. Shimotsuma, K. Hirao, J. R. Qiu, and P. G. Kazansky, Mod. Phys. Lett. B 19, 225 (2005). 10.1142/S0217984905008281 103. V. Mizeikis, S. Juodkazis, T. Balinas, H. Misawa, S. I. Kudryashov, V. D. Zvorykin, and A. A. Ionin, J. Appl. Phys. 105, 123106 (2009). 10.1063/1.3148249 104. L. V. Keldysh, Sov. Phys. JETP 20, 1307 (1965); available at http://www.jetp.ac.ru/cgi-bin/e/index/e/20/5/p1307?a=list. 105. I. N. Zavestovskaya, P. G. Eliseev, O. N. Krokhin, and N. A. Men'kova, Appl. Phys. A 92, 903 (2008). 10.1007/s00339-008-4609-9 106. J. Peng, D. Grojo, D. M. Rayner, and P. B. Corkum, Appl. Phys. Lett. 102, 161105 (2013). 10.1063/1.4802820 107. O. A. Louchev, H. Hatano, S. Wada, and K. Kitamura, Appl. Phys. Lett. 103, 091114 (2013). 10.1063/1.4819758 108. T. Jankowiak and T. Lodygowski, in Handbook of Damage Mechanics edited by G. Z. Voyiadjis (Springer Science + Business Media, New York, 2013). 109. V. V. Zhakhovsky, M. M. Budzevich, N. A. Inogamov, I. I. Oleynik, and C. T. White, Phys. Rev. Lett. 107, 135502 (2011). 10.1103/PhysRevLett.107.135502 110. N. A. Inogamov, V. V. Zhakhovsky, S. I. Ashitkov, M. B. Agranat, P. S. Komarov, V. A. Khokhlov, and V. V. Shepelev, AIP Conf. Proc. 1278, 590 (2010). 10.1063/1.3507151 111. T. Yoshino, Y. Ozeki, M. Matsumoto, and K. Itoh, Jpn. J. Appl. Phys., Part 1 51, 102403 (2012). 10.7567/JJAP.51.102403 112. Y. Bellouard and M.-O. Hongler, Opt. Express 19, 6807 (2011). 10.1364/OE.19.006807 113. V. P. Skripov, Metastable Liquids (Halsted Press, John Wiley and Sons, New York, 1974). 114. S. P. Timoshenko, Course of Theory of Elasticity (Naukova Dumka, Kiev, 1972) (in Russian). 115. A. Mermillod-Blondin, H. Mentzel, and A. Rosenfeld, Opt. Lett. 38, 4112 (2013). 10.1364/OL.38.004112 116. M. Sakakura, M. Terazima, Y. Shimotsuma, K. Miura, and K. Hirao, Opt. Express 15, 5674 (2007). 10.1364/OE.15.005674 117. T. Asada, T. Tamaki, M. Nakazumi, E. Ohmura, and K. Itoh, J. Laser Micro/Nanoeng. 9, 174 (2014). 10.2961/jlmn.2014.02.0017 118. J. Menčík, L. H. He, and M. V. Swain, J. Mech. Behav. Biomed. Mater. 2, 318 (2009). 10.1016/j.jmbbm.2008.09.002 119. S. C. Hardy, J. Colloid Interface Sci. 69, 157 (1979). 10.1016/0021-9797(79)90090-0 120. M. Kolesik and J. Moloney, Phys. Rev. E 70, 036604 (2004). 10.1103/PhysRevE.70.036604 121. A. Couairon, E. Brambilla, T. Corti, D. Majus, O. Ramírez-Góngora, and M. Kolesik, Eur. Phys. J. Spec. Top. 199, 5 (2011). 10.1140/epjst/e2011-01503-3 122. E. S. Efimenko and A. V. Kim, Phys. Rev. E 84, 036408 (2011). 10.1103/PhysRevE.84.036408 123. J. E. Sipe, J. F. Young, J. S. Preston, and H. M. van Driel, Phys. Rev. B 27, 1141 (1983). 10.1103/PhysRevB.27.1141 124. L. N. Gaier, M. Lein, M. I. Stockman, P. L. Knight, P. B. Corkum, M. Y. Ivanov, and G. L. Yudin, J. Phys. B: At. Mol. Opt. Phys. 37, L57 (2004). 10.1088/0953-4075/37/3/L04 125. F. A. Unran, Y. Liao, M. M. Alias, K. Sugioka, R. Stoian, G. Cheng, and Ya. Cheng, Opt. Express 21, 15259 (2013). 10.1364/OE.21.015259 126. P. G. Kazansky, W. J. Yang, E. Bricchi, J. Bovatsek, A. Arai, Y. Shimotsuma, K. Miura, and K. Hirao, Appl. Phys. Lett. 90, 151120 (2007). 10.1063/1.2722240 127. D. N. Vitek, E. Block, Y. Bellouard, D. E. Adams, S. Backus, D. Kleinfeld, C. G. Dufree, and J. A. Squier, Opt. Express 18, 24673 (2010). 10.1364/OE.18.024673 128. S. Akturk, X. Gu, P. Gabolde, and R. Trebino, Opt. Express 13, 8642 (2005). 10.1364/OPEX.13.008642 129. J.-M. Guay, A. Villafranca, F. Baset, K. Popov, L. Ramunno, and V. R. Bhardwaj, New J. Phys. 14, 085010 (2012). 10.1088/1367-2630/14/8/085010 130. M. Beresna, M. Gecevičius, and P. G. Kazansky, Proc. SPIE 8204, 820415 (2011). 10.1117/12.905364