| Инд. авторы: | Shokin Yu.I., Grigoryev Yu.N., Gorobchuk A.G. |
| Заглавие: | Advanced Optimization of Etching Processes in Radial-Flow Plasma-Chemical Reactor |
| Библ. ссылка: | Shokin Yu.I., Grigoryev Yu.N., Gorobchuk A.G. Advanced Optimization of Etching Processes in Radial-Flow Plasma-Chemical Reactor // International Journal of Computational Fluid Dynamics. - 2000. - Vol.9. - Iss. 1. - ISSN 1061-8562. - EISSN 1029-0257. |
| Издано: | 2000 |