| Инд. авторы: | Shokin Yu.I., Grigoryev Yu.N., Gorobchuk A.G. |
| Заглавие: | Advanced optimization of etching processes in plasma-chemical reactors |
| Библ. ссылка: | Shokin Yu.I., Grigoryev Yu.N., Gorobchuk A.G. Advanced optimization of etching processes in plasma-chemical reactors // 8th International Simposium on Computational Fluid Dynamics: Universitat Bremen, 1999, 1999. - P.106-107. |
| Издано: | Universitat Bremen, 1999 |
| Физ. характеристика: | с.106-107 |