| Инд. авторы: | Shokin Yu.I., Grigoryev Yu.N., Gorobchuk A.G. |
| Заглавие: | Numerical modeling and optimization of plasma-chemical etching reactors |
| Библ. ссылка: | Shokin Yu.I., Grigoryev Yu.N., Gorobchuk A.G. Numerical modeling and optimization of plasma-chemical etching reactors // 16th International Conference on Numerical Methods in Fluid Dynamics. Final Program. Arcachon, 1998. - P.315-316. |
| Издано: | Arcachon: , 1998 |
| Физ. характеристика: | с.315-316 |