| Инд. авторы: | Novikov Yu.N., Morokov Yu.N., Gritsenko V.A. |
| Заглавие: | The modeling of Charge Trapping of Three-Coordinated Silicon Atom and Two Coordinated Nitrogen Atom in Silicon Nitride |
| Библ. ссылка: | Novikov Yu.N., Morokov Yu.N., Gritsenko V.A. The modeling of Charge Trapping of Three-Coordinated Silicon Atom and Two Coordinated Nitrogen Atom in Silicon Nitride // Silicon Materials and Processing, 193 Meeting of The Electrochemical Society, 4-9 May, 1998, San Diego, USA, 1998. - P.507. |
| Издано: | 1998 |
| Физ. характеристика: | с.507 |