| Инд. авторы: | Gadiyak G.V. | 
| Заглавие: | Theoretical Model and Computer Simulation Results of Enhanced Diffusion of High-Temperature Implanted Aluminum in Silicon Carbide | 
| Библ. ссылка: | Gadiyak G.V. Theoretical Model and Computer Simulation Results of Enhanced Diffusion of High-Temperature Implanted Aluminum in Silicon Carbide // Fall Meeting of Materials research Society, 30 November-4 December, 1998, Boston, USA, 1998. | 
| Издано: | 1998 |