| Инд. авторы: | Gritsenko V.A., Morokov Yu.N., Novikov Yu.N., Petrenko I.P., Svitasheva S.N., Wong H., Kwok R., Chan R. |
| Заглавие: | Characterization of the Silicon Nitride-Thermal Oxide Interface in ONO Structures by ELS, XPS, Ellipsometry, and Numerical Simulation |
| Библ. ссылка: | Gritsenko V.A., Morokov Yu.N., Novikov Yu.N., Petrenko I.P., Svitasheva S.N., Wong H., Kwok R., Chan R. Characterization of the Silicon Nitride-Thermal Oxide Interface in ONO Structures by ELS, XPS, Ellipsometry, and Numerical Simulation // Proceedings of the 21 Int. Conf. on Microelectronics, 14-17 Sept., 1997. Nis: Yugoslavia, 1997, 1997. - P.111-114. |
| Издано: | Nis: Yugoslavia, 1997 |
| Физ. характеристика: | с.111-114 |