Инд. авторы: | Gadiyak G.V. |
Заглавие: | Theoretical Model and Computer Simulation Results of Enhanced Diffusion of High-Temperature Implanted Aluminum in Silicon Carbide |
Библ. ссылка: | Gadiyak G.V. Theoretical Model and Computer Simulation Results of Enhanced Diffusion of High-Temperature Implanted Aluminum in Silicon Carbide // Material Research Society MRS Meeting, 1-7 December, 1997, Boston, USA. - 1997. |
Издано: | 1997 |