| Инд. авторы: | Gadiyak G.V. |
| Заглавие: | Theoretical Model and Computer Simulation Results of Enhanced Diffusion of High-Temperature Implanted Aluminum in Silicon Carbide |
| Библ. ссылка: | Gadiyak G.V. Theoretical Model and Computer Simulation Results of Enhanced Diffusion of High-Temperature Implanted Aluminum in Silicon Carbide // V International Conference on VLSI and CAD, 13-15 October, 1997, Seoul, Korea. - 1997. |
| Издано: | 1997 |