| Инд. авторы: | Grigoryev Yu.N., Gorobchuk A.G. |
| Заглавие: | Numerical Investigation of Etching Mechanisms in Planar Plasma-Chemical Reactors with Heat-Mass Transfer |
| Библ. ссылка: | Grigoryev Yu.N., Gorobchuk A.G. Numerical Investigation of Etching Mechanisms in Planar Plasma-Chemical Reactors with Heat-Mass Transfer // Proceedings of the 8 Internat. Conf. on the Methods of Aeroph. Res. Pt. 2., 2-6 Sept., 1996, Novosibirsk, Russia. Novosibirsk: Published by Inst. of Pure and Appl. Mech. SD RAS, 1996, 1996. - P.89-94. |
| Издано: | Novosibirsk: Published by Inst. of Pure and Appl. Mech. SD RAS, 1996 |
| Физ. характеристика: | с.89-94 |