| Инд. авторы: | Gadiyak G.V., Kachurin G.A., Tyschenko I.E., Tijs S.A. |
| Заглавие: | Oscillating Distribution of Implanted N in Si Layers Due to Competition of Sinks |
| Библ. ссылка: | Gadiyak G.V., Kachurin G.A., Tyschenko I.E., Tijs S.A. Oscillating Distribution of Implanted N in Si Layers Due to Competition of Sinks // NATO Advanced Research Workshop. Physical and Technical Problems of SOI Structures and Devices. Gurzuf, Crimea, Ukraine. November 1-4, 1994. Ukraine, 1994. - P.36-37. |
| Издано: | Ukraine: , 1994 |
| Физ. характеристика: | с.36-37 |